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Ultra High Purity Process Chemicals for Semiconductor/FPD Industries
“Star Series”
In recent years, the demand is increasing for high quality removal of particles and metals from small size semiconductor circuits during silicon wafer cleaning process. Star Series meets those demands with semiconductor process chemicals having metal impurity levels below 10ppt.
Products: Sulfuric acid, Nitric acid, Hydrochloric acid, Acetic acid, Ammonia solution, Hydrogen peroxide, Isopropyl alcohol
Contact Information
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- Electronic Device Chemicals Dept., Information,and Electronics Div.
Ultra High Purity Process Chemicals for Semiconductor/FPD Industries “Star Series” Characteristics
■ About Ultra High Purity Process Chemicals for Semiconductor/FPD Industries “Star Series”
In order to achieve ultra-high purity with the semiconductor wafer free from inorganic and organic residues, the following properties are required;
1. Particle removal
2. Removal of organic residues
3. Removal of metal residues
Our chemical products meet those requirements and provide high performance for the semiconductor and flat panel industries.
[Lineup]
Hydrochloric acid
Nitric acid
Ammonia solution
Sulfuric acid
Acetic acid
Hydrogen peroxide
■ Ultra High Purity Process Chemicals for Semiconductor/FPD Industries “Star Series” Characteristics
1. Providing high-quality products for over 30 years
2. Improving quality in collaboration with major semiconductor companies
3. Adaptation to miniaturization of semiconductor circuits
4. High-performance quality control in comprehensive chemical company
Developed with these principles, Star Series provides the ability to reduce metal impurities below 10ppt.
We are continuing to develop and improve high-purity chemicals to support the advancing miniaturization of semiconductor processors.
Ultra High Purity Process Chemicals for Semiconductor/FPD Industries “Star Series” Applications
Silicon wafer cleaning during semiconductor processing
Ultra High Purity Process Chemicals for Semiconductor/FPD Industries “Star Series” Specifications
■ Star Series site search classification
[Product Families]
Display and related materials/Electronic chemicals/Specialty chemicals/
[Applications]
IT, Ubiquitous network/
Contact Information
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- Electronic Device Chemicals Dept., Information,and Electronics Div.
- Product Families
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- Display and related materials
- Specialty chemicals
- Materials for synthetic fibers
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